Fabrication of Silicon Microprobes for Optical Near-Field Applications (English, Phan Ngoc Minh | Ono Takahito | Esashi Masayoshi)
by Phan Ngoc Minh | Ono Takahito | Esashi Masayoshi
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Book Details
Publisher
CRC Press
Language
English
ISBN-13
9780849311543
ISBN-10
0849311543
Author
Phan Ngoc Minh | Ono Takahito | Esashi Masayoshi
About the Book
Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical perf…
ISBN: 9780849311543
ISBN-13: 9780849311543
ISBN-10: 0849311543
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Product ID: isbn-9780849311543
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