Silizium-Halbleitertechnologie (English, Ulrich Hilleringmann)
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Book Details
Publisher
Vieweg+teubner Verlag
Language
English
ISBN-13
9783519001492
ISBN-10
3519001497
Author
Ulrich Hilleringmann
About the Book
Das vorliegende Studien skript "Silizium-Halbleitertechnologie" ist aus der Vorlesung "Halbleitertechnologie" entstanden, die erstmalig im Wintersemester 1989/90 von Prof. Dr.-Ing. K. Schumacher an der Universität Dortmund gehalten wurde. Um die rasante Entwicklung der Proze technik berücksichtigen zu können, ist der Inhalt der inzwischen auf zwei Semester ausgedehnten Vorlesung um fortschrittliche Integra- tionstechniken erweitert worden. Ziel d…
ISBN: 9783519001492
ISBN-13: 9783519001492
ISBN-10: 3519001497
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Product ID: isbn-9783519001492
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